Pompe à vide turbomoleculaire et contrôleur non présents
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2× Leybold Vacuum CTR 90 CERAVAC
PFEIFFER IKR 251 compact cold cathode gauge
VAT 26432-KA41-0001/0319 vacuum angle valve
Additional large VAT vacuum valve
Large high-vacuum valve assembly
Gas Handling, Actuation & Process Hardware
Actuation System THC-8AWDS linear actuator (400 mm travel)
Various sensors, including pressure, temperature and switching
sensors
Various actuators including solenoid valves and heating
elements
CVD frame (original SP-500, retrofitted 2011)
Mass flow control cabinet (included)
Safety & Process Protection
RF & Power Delivery
RF DRESSLER – AE Dressler VM 1000 A, 1000 W, 13.56 MHz
RFPP RF10S unit
Advanced Energy MDX 500 (non-functional – does not turn on)
RF Power AM-5 7600001010, 500 W, 13.56 MHz
TDK Lambda power supply GEN40-125
Control Unit & Electronics
MKS Type 252C-1-VPO exhaust valve controller
MKS Type 152 automatic pressure controller
MKS Type 600 automatic pressure controller
MKS Type 2708
19″ rack-mount PC (no password for the control software)
Auction-ID: A1-49139-3