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Système de bancs humides ROBOTECHNIK EUROPE OPTIwet ST30
technologie des processus / machines et installations pour l'ingénierie des processus
System for wet chemical processing of wafers up to 12in, substrates up to X/Y 9in/9in, stand-alone housing, process modules, PP process chamber, 2 programmable media arms, rotational speed 1-4000rpm, acceleration ramp 1-3000rpm, spin time 1-999s, exhaust process bowl 2x DN110, chamber 2x DN110, ...
Fabricant: ROBOTECHNIK EUROPE
Modèle:OPTIwet ST30
Type de machine: Système de bancs humides
Numéro de l'article: 168334041
Quantité: 1
Date: 20.06.2026
Emplacement:
Allemagne
Deutschland
Prix:
Machine en stock:Non
Seller-item-No.:INNO30389
System for wet chemical processing of wafers up to 12in, substrates up
to X/Y 9in/9in, stand-alone housing, process modules, PP process
chamber, 2 programmable media arms, rotational speed 1-4000rpm,
acceleration ramp 1-3000rpm, spin time 1-999s, exhaust process bowl 2x
DN110, chamber 2x DN110, housing 1x DN110, control 1x DN110 (each
approx. 200m³/h), CDA 8+/-2bar, vacuum -0.8+/-0.2bar, nitrogen
4.0+/-0.5bar, 3 media drains, waste box for 2 concentrate wastes,
reagent box with pressure vessel, 4 Julabo thermostat baths. The
system was dismantled during disassembly. Viewing possible by
arrangement.
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